直徑mm

± mm

厚度um

± um

R Ω

TTV um

Bow um

Warp

Particle

Laser Mark

2"

50.8

0.3

430

20

<0.0015

4"

100

0.3

430

20

<0.0015

5" Wafer

125

0.5

>500u

~

1-100

~

~

~

6"

150

0.5

625u

25 , 35

1-100

≦25

≦70

≦30 , 70

0.5u≦30

Yes

8"

200

0.2

725u

25

1-100

25

30

≦50

0.3u≦30

Yes

12"

300

0.2

775u

25

1-100

25

20

≦40

0.3u≦30

T7M12